Peizoresistive MEMS Cantilever based CO2 Gas Sensor
نویسندگان
چکیده
منابع مشابه
Peizoresistive Mems Cantilever based Co2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
متن کاملPeizoresistive MEMS Cantilever based CO2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
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ژورنال
عنوان ژورنال: International Journal of Computer Applications
سال: 2012
ISSN: 0975-8887
DOI: 10.5120/7725-1128